Detection of pathological mechano-acoustic signatures using precision accelerometer contact microphones in patients with pulmonary disorders von Gupta, Pranav, Wen, Haoran, Di Francesco, Lorenzo, Ayazi, Farrokh

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Cascaded collimator for atomic beams traveling in planar silicon devices von Li, Chao, Chai, Xiao, Wei, Bochao, Yang, Jeremy, Daruwalla, Anosh, Ayazi, Farrokh, Raman, C.

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Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals von Gupta, Pranav, Moghimi, Mohammad J., Jeong, Yaesuk, Gupta, Divya, Inan, Omer T., Ayazi, Farrokh

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Eigenmode operation of piezoelectric resonant gyroscopes von Hodjat-Shamami, Mojtaba, Ayazi, Farrokh

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An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon von Abdolvand, Reza, Ayazi, Farrokh

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Temperature-Stable Silicon Oxide (SilOx) Micromechanical Resonators von Tabrizian, Roozbeh, Casinovi, Giorgio, Ayazi, Farrokh

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Temperature Compensation of Silicon Resonators via Degenerate Doping von Samarao, Ashwin K., Ayazi, Farrokh

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Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes von Liu, Zhenming, Wen, Haoran, Ayazi, Farrokh

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4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation von Liu, Zhenming, Long, Yaoyao, Wehner, Charlotte, Wen, Haoran, Ayazi, Farrokh

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An Accelerometer-Based Wearable Patch for Robust Respiratory Rate and Wheeze Detection Using Deep Learning von Sang, Brian, Wen, Haoran, Junek, Gregory, Neveu, Wendy, Di Francesco, Lorenzo, Ayazi, Farrokh

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A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators von Liu, Zhenming, Ayazi, Farrokh

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A Review of Eigen-Mode and Frequency Control in Piezoelectric MEMS Resonators von Liu, Zhenming, Ayazi, Farrokh

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Low motional impedance distributed Lamé mode resonators for high frequency timing applications von Daruwalla, Anosh, Wen, Haoran, Liu, Chang-Shun, Ayazi, Farrokh

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Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators von Sundaresan, K., Ho, G.K., Pourkamali, S., Ayazi, F.

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Micromechanical IBARs: Tunable High- Q Resonators for Temperature-Compensated Reference Oscillators von Ho, Gavin K, Sundaresan, Krishnakumar, Pourkamali, Siavash, Ayazi, Farrokh

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Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators Using Enhanced Series Tuning Technique von Lavasani, H. M., Wanling Pan, Harrington, B. P., Abdolvand, R., Ayazi, F.

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Micro-gravity capacitive silicon-on-insulator accelerometers von Vakili Amini, Babak, Ayazi, Farrokh

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MEMS for integrated timing and spectral processing von Ayazi, F.

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A Dual-Mode Actuation and Sensing Scheme for In-Run Calibration of Bias and Scale Factor Errors in Axisymmetric Resonant Gyroscopes von Norouzpour-Shirazi, Arashk, Ayazi, Farrokh

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Robust characterization of microfabricated atomic beams on a six-month time scale von Li, Chao, Wei, Bochao, Chai, Xiao, Yang, Jeremy, Daruwalla, Anosh, Ayazi, Farrokh, Raman, C.

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