Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy von Senez, Vincent, Armigliato, Aldo, De Wolf, Ingrid, Carnevale, Gianpietro, Balboni, Roberto, Frabboni, Stefano, Benedetti, Alessandro

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Nitridation of the SiO2/SiC Interface by N+ Implantation: Hall versus Field Effect Mobility in n-Channel Planar 4H-SiC MOSFETs von Belsito, Luca, Solmi, Sandro, Poggi, Antonella, Armigliato, Aldo, Moscatelli, Francesco, Nipoti, Roberta

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Comparison of Cliff–Lorimer-Based Methods of Scanning Transmission Electron Microscopy (STEM) Quantitative X-Ray Microanalysis for Application to Silicon Oxycarbides Thin Films von Parisini, Andrea, Frabboni, Stefano, Gazzadi, Gian Carlo, Rosa, Rodolfo, Armigliato, Aldo

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FIB Preparation of a NiO Wedge-Lamella and STEM X-Ray Microanalysis for the Determination of the Experimental k(O-Ni) Cliff-Lorimer Coefficient von Armigliato, Aldo, Frabboni, Stefano, Gazzadi, Gian Carlo, Rosa, Rodolfo

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Modern Developments and Applications in Microbeam Analysis von Love, Glyn, Nicholson, W. A. Patrick, Armigliato, Aldo

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Modern Developments and Applications in Microbeam Analysis von Love, Glyn, Nicholson, W.A.Patrick, Armigliato, Aldo

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A Novel Monte-Carlo Based Method for Quantitative Thin Film X-Ray Microanalysis von Armigliato, Aldo, Balboni, Roberto, Frabboni, Stefano, Rosa, Rodolfo

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Application of the parametric bootstrap method to determine statistical errors in quantitative X-ray microanalysis of thin films von ARMIGLIATO, ALDO, BALBONI, ROBERTO, ROSA, RODOLFO

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Convergent beam electron diffraction investigation of strain induced by Ti self-aligned silicides in shallow trench Si isolation structures von Armigliato, Aldo, Spessot, Alessio, Balboni, Roberto, Benedetti, Alessandro, Carnevale, Gianpietro, Frabboni, Stefano, Mastracchio, Gianfranco, Pavia, Giuseppe

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Thin film X-ray microanalysis with the analytical electron microscope von ARMIGLIATO, A

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Convergent beam electron diffraction investigation of strain inducedby Ti self-aligned silicides in shallow trench Si isolation structures von Armigliato, Aldo, Spessot, Alessio, Balboni, Roberto, Benedetti, Alessandro, Carnevale, Gianpietro, Frabboni, Stefano, Mastracchio, Gianfranco, Pavia, Giuseppe

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Numerical analysis of the process-induced stresses in silicon microstructures: application to micromachined cantilever von Senez, Vincent, Hoffmann, Thomas, Armigliato, Aldo, De Wolf, Ingrid

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Structural and Analytical Characterization by Scanning Transmission Electron Microscopy of Silicon-based Nanostructures von Armigliato, Aldo, Balboni, Roberto, Parisini, Andrea

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Modern Developments and Applications in Microbeam Analysis. Proceedings of the 9th Workshop of the European Microbeam Analysis Society (EMAS) and the 3rd Meeting of the Internation... von Rinaldi, Romano, Armigliato, Aldo, Santo, Alba P., Vaggelli, Gloria, Walker, Clive T., Bastin, Guillaume F., Gauvin, Raynald

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Transmission electron microscopy investigation of tin sub-oxide nucleation upon SnO2 deposition on silicon von Alfonso, Claude, Charaï, Ahmed, Armigliato, Aldo, Narducci, Dario

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Modern Developments and Applications in Microbeam Analysis, Proceedings of the 7th Workshop of the European Microbeam Analysis Society (EMAS), May 6-10, 2001, Tampere, Finland von HEIKINHEIMO, Erkki, WALKER, Clive Thomas, ARMIGLIATO, Aldo

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Investigation of strain distribution in LOCOS structures by dynamical simulation of LACBED patterns von Wu, Feng, Armigliato, Aldo, Balboni, Roberto, Frabboni, Stefano

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Dislocation Generation in Device Fabrication Process von Polignano, Maria Luisa, Pavia, Giuseppe, Carnevale, G.P., Cazzaniga, F., Balboni, R., Soncini, V., Mica, Isabella, Brambilla, M., Armigliato, Aldo

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Special Issue containing the Proceeding of the 9th Workshop of the European Microbeam Analysis Society (EMAS) and the 3rd Meeting of the International Union of Microbeam Analysis S... von RINALDI, Romano, ARMIGLIATO, Aldo, SANTO, Alba P, VAGGELLI, Gloria, WALKER, Clive T, BASTIN, Guillaume F, GAUVIN, Raynald

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Influence of experimental parameters on the determination of tetragonal distortion in heterostructures by LACBED von ARMIGLIATO, A, BALBONI, R, CORTICELLI, F, FRABBONI, S

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