Thermally assisted MRAM von Anthony Joseph Annunziata, Daniel Christopher Worledge, Lucien Lombard, Philip Louis Trouilloud, Lucian Prejbeanu, Sebastien Bandiera

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Thermally assisted MRAM von DANIEL CHRISTOPHER WORLEDGE, ANTHONY JOSEPH ANNUNZIATA, LUCIEN LOMBARD, SEBASTIEN BANDIERA, PHILIP LOUIS TROUILLOUD, LUCIAN PREJBEANU

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Thermally assisted MRAM von DANIEL CHRISTOPHER WORLEDGE, ANTHONY JOSEPH ANNUNZIATA, LUCIEN LOMBARD, SEBASTIEN BANDIERA, PHILIP LOUIS TROUILLOUD, LUCIAN PREJBEANU

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Thermally assisted MRAM von DANIEL CHRISTOPHER WORLEDGE, ANTHONY JOSEPH ANNUNZIATA, LUCIEN LOMBARD, SEBASTIEN BANDIERA, PHILIP LOUIS TROUILLOUD, LUCIAN PREJBEANU

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Critical BEOL Aspects of the Fabrication of a Thermally-Assisted MRAM Device von O'Sullivan, E. J., Edelstein, Daniel, Marchack, Nathan, Lofaro, Michael, Gaidis, Michael, Joseph, Eric, Annunziata, Anthony, Pfeiffer, Dirk, Trouilloud, P. L., Zhu, Yu, Holmes, Steve, Galan, Armand, Pyzna, Adam M., Gonsalves, Jemima

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Etching Methods for STT-MRAM von O'Sullivan, E. J., Annunziata, Anthony J, Gonsalves, Jemima, Hu, G., Joseph, Eric A, Kothandaraman, Raman, Lauer, Gen, Marchack, Nathan, Nowak, J. J., Robertazzi, R. P., Sun, J. Z., Suwannasiri, Thitima, Trouilloud, P. L., Zhu, Yu, Worledge, D. C.

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Spin torque MRAM fabrication using negative tone lithography and ion beam etching von Annunziata, Anthony J, Galan, Armand A, Lauer, Gen P, Marchack, Nathan P, Joseph, Eric A, Holmes, Steve, Lin, Qinghuang

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Spin torque MRAM fabrication using negative tone lithography and ion beam etching von Annunziata, Anthony J, Galan, Armand A, Lauer, Gen P, Marchack, Nathan P, Joseph, Eric A, Holmes, Steve, Lin, Qinghuang

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SPIN TORQUE MRAM FABRICATION USING NEGATIVE TONE LITHOGRAPHY AND ION BEAM ETCHING von Joseph Eric A, Lin Qinghuang, Annunziata Anthony J, Marchack Nathan P, Galan Armand A, Lauer Gen P, Holmes Steve

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Spin torque MRAM fabrication using negative tone lithography and ion beam etching von Joseph Eric A, Lin Qinghuang, Annunziata Anthony J, Marchack Nathan P, Galan Armand A, Lauer Gen P, Holmes Steve

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Critical BEOL Aspects of the Fabrication of a Thermally-Assisted MRAM Device von O'Sullivan, E. J., Edelstein, Daniel, Marchack, Nathan, Lofaro, Michael, Gaidis, Michael, Joseph, Eric, Annunziata, Anthony, Pfeiffer, Dirk, Trouilloud, P. L., Zhu, Yu, Holmes, Steve, Galan, Armand, Pyzna, Adam M., Gonsalves, Jemima

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Low temperature encapsulation for magnetic tunnel junction von Engelmann Sebastian U, Yamazaki Masahiro, Joseph Eric A, Annunziata Anthony J, Marchack Nathan P, Neumayer Deborah A, Lauer Gen P

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LOW TEMPERATURE ENCAPSULATION FOR MAGNETIC TUNNEL JUNCTION von Engelmann Sebastian U, Yamazaki Masahiro, Joseph Eric A, Annunziata Anthony J, Marchack Nathan P, Neumayer Deborah A, Lauer Gen P

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SPIN TORQUE MRAM FABRICATION USING NEGATIVE TONE LITHOGRAPHY AND ION BEAM ETCHING von Joseph Eric A, Lin Qinghuang, Annunziata Anthony J, Marchack Nathan P, Galan Armand A, Lauer Gen P, Holmes Steve

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SPIN TORQUE MRAM FABRICATION USING NEGATIVE TONE LITHOGRAPHY AND ION BEAM ETCHING von Joseph Eric A, Lin Qinghuang, Annunziata Anthony J, Marchack Nathan P, Galan Armand A, Lauer Gen P, Holmes Steve

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