METHOD FOR CONTINUOUS PRODUCTION OF BEAM OF CARBORANE IONS WITH CONSTANT SELF-CLEANING OF ION SOURCE AND COMPONENT OF ION IMPLANTER EXTRACTION SYSTEM von GURKOVA EHLLA LAZAREVNA, STOROZHENKO PAVEL ARKAD'EVICH, KUJBIDA ROSTISLAV PETROVICH, ADI GERSHKOVICH, KROPACHEV GENNADIJ NIKOLAEVICH, SELEZNEV DMITRIJ NIKOLAEVICH, OKS EFIM MIKHAJLOVICH, DUGIN SERGEJ NIKOLAEVICH, KULEVOJ TIMUR VJACHESLAVOVICH, ALEKSEENKO OLEG VASIL'EVICH, GUSHENETS VASILIJ IVANOVICH

Volltext bestellen